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060708s1990----gr er 000 0 Eng d |
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|a 0471924784
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|a GR-AtNTU
|b gre
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082 |
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|a 621.38152 MOR
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100 |
1 |
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|a Morgan, D. V.
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245 |
1 |
3 |
|a An introduction to semiconductor microtechnology /
|c D.V. Morgan, K. Board
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250 |
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|a 2nd ed.
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260 |
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|a Chichester:
|b John Wiley and Sons,
|c c1990
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300 |
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|a xiv, 208 p. :
|b ill. ;
|c 24 cm.
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504 |
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|a Includes bibliographical references and index.
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650 |
1 |
0 |
|a Semiconductors
|x Design and construction
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700 |
1 |
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|a Board, K.
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952 |
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|a GR-AtNTU
|b 59cc13dd6c5ad13446f66ab0
|c 998a
|d 945l
|e 621.38152 MOR
|t 1
|x m
|z Books
|