An introduction to semiconductor microtechnology /

Main Author: Morgan, D. V.
Other Authors: Board, K.
Format: Book
Published: Chichester: John Wiley and Sons, c1990
Edition:2nd ed.
Subjects:
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008 060708s1990----gr er 000 0 Eng d
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040 |a GR-AtNTU  |b gre 
082 0 |a 621.38152 MOR 
100 1 |a Morgan, D. V. 
245 1 3 |a An introduction to semiconductor microtechnology /  |c D.V. Morgan, K. Board 
250 |a 2nd ed. 
260 |a Chichester:  |b John Wiley and Sons,  |c c1990 
300 |a xiv, 208 p. :  |b ill. ;  |c 24 cm. 
504 |a Includes bibliographical references and index. 
650 1 0 |a Semiconductors  |x Design and construction 
700 1 |a Board, K. 
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