Description: An introduction to semiconductor microtechnology /

Main Author:	Morgan, D. V.
Other Authors:	Board, K.
Format:	Book
Published:	Chichester: John Wiley and Sons, c1990
Edition:	2nd ed.
Subjects:	Semiconductors > Design and construction

Physical Description:	xiv, 208 p. : ill. ; 24 cm.
Bibliography:	Includes bibliographical references and index.
ISBN:	0471924784