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040512s2003----gr er 000 0 Eng d |
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|a 1584883065
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|a GR-AtNTU
|b gre
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| 082 |
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|a 621.3 PEL
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| 100 |
1 |
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|a Pelesko, John A.
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| 245 |
1 |
0 |
|a Modeling and MEMS and NEMS /
|c John A. Pelesko, David H. Bernstein
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| 260 |
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|a Boca Raton, FL.:
|b Chapman & Hall,
|c c2003
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| 300 |
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|a xxiii, 357 p. :
|b fig. ;
|c 24 cm.
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| 504 |
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|a Includes references, index.
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| 650 |
1 |
0 |
|a Microelectromechanical systems
|x Mathematical models
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| 700 |
1 |
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|a Bernstein, David H.
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| 952 |
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|a GR-AtNTU
|b 59cc12c66c5ad13446f648cf
|c 998a
|d 945l
|e 621.3 PEL
|t 1
|x m
|z Books
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