Cover Image

Modeling and MEMS and NEMS /

Main Author: Pelesko, John A.
Other Authors: Bernstein, David H.
Format: Book
Published: Boca Raton, FL.: Chapman & Hall, c2003
Subjects:
Microelectromechanical systems > Mathematical models
Physical Description:xxiii, 357 p. : fig. ; 24 cm.
Bibliography:Includes references, index.
ISBN:1584883065

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