Silicon wafer bonding technology : for VLSI and MEMS applications /
| Corporate Authors: | , , |
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| Other Authors: | , |
| Format: | Book |
| Language: | English |
| Published: |
London:
Institution of Electrical Engineers,
c2002
|
| Series: | EMIS processing series
no. 1 |
| Subjects: |
| Physical Description: | xxv, 149 σ. : εικ. ; 26 εκ. |
|---|---|
| Bibliography: | Περιέχει βιβλιογραφικές παραπομπές και ευρετήριο |
| ISBN: | 0852960395 |