Microsensors, MEMS, and smart devices /

Main Author: Gardner, Julian W
Other Authors: Varadan, Vijay K., Awadelkarim, Osama O.
Format: Book
Published: Chichester: John Wiley and Sons, Ltd, c2001
Subjects:
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245 1 0 |a Microsensors, MEMS, and smart devices /  |c Julian W. Gardner, Vijay K. Varadan, Osama O. Awadelkarim 
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300 1 0 |a xvi, 503 p. :  |b ill., figs ;  |c 25 cm. 
500 1 0 |a Reprinted 2002. 
504 1 0 |a Includes index. 
650 1 0 |a Microelectromechanical systems 
650 1 0 |a Detectors 
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700 1 0 |a Awadelkarim, Osama O. 
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