Cover Image

Microsensors, MEMS, and smart devices /

Main Author: Gardner, Julian W
Other Authors: Varadan, Vijay K., Awadelkarim, Osama O.
Format: Book
Published: Chichester: John Wiley and Sons, Ltd, c2001
Subjects:
Microelectromechanical systems
Detectors
Item Description:Reprinted 2002.
Physical Description:xvi, 503 p. : ill., figs ; 25 cm.
Bibliography:Includes index.
ISBN:047186109x

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