Nano and giga challenges in microelectronics /

Other Authors: Korkin, Anatoli.
Format: Book
Language:English
Published: Amsterdam ; London : Elsevier, 2003.
Subjects:
Online Access:http://search.ebscohost.com/login.aspx?direct=true&scope=site&db=nlebk&AN=203377
Table of Contents:
  • Front Cover; Nano and Giga Challenges in Microelectronics; Copyright Page; Preface; Contents; Chapter 1. Integrated Circuit Technologies: From Conventional CMOS to the Nanoscale era; Chapter 2. Electronics Below 10 nm; Chapter 3. Lithography: Concepts, Challenges, and Prospects; Chapter 4. Experimental Investigations of the Stability of Candidate Materials for High-K Gate Dielectrics in Silicon-Based MOS; Chapter 5. Defects in wide-gap oxides: Computer modelling and challenges; Chapter 6. Tunneling Through Single Molecules; Chapter 7. Practical Quantum Computing; Subject Index.