Nano and giga challenges in microelectronics /

Other Authors: Korkin, Anatoli.
Format: Book
Language:English
Published: Amsterdam ; London : Elsevier, 2003.
Subjects:
Online Access:http://search.ebscohost.com/login.aspx?direct=true&scope=site&db=nlebk&AN=203377
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245 0 0 |a Nano and giga challenges in microelectronics /  |c edited by J. Greer, Anatoli Korkin, Jan Labanowski. 
260 |a Amsterdam ;  |b Elsevier,  |c 2003.  |a London : 
300 |a 1 online resource (v, 255 pages) :  |b illustrations 
504 |a Includes bibliographical references and index. 
505 0 |a Front Cover; Nano and Giga Challenges in Microelectronics; Copyright Page; Preface; Contents; Chapter 1. Integrated Circuit Technologies: From Conventional CMOS to the Nanoscale era; Chapter 2. Electronics Below 10 nm; Chapter 3. Lithography: Concepts, Challenges, and Prospects; Chapter 4. Experimental Investigations of the Stability of Candidate Materials for High-K Gate Dielectrics in Silicon-Based MOS; Chapter 5. Defects in wide-gap oxides: Computer modelling and challenges; Chapter 6. Tunneling Through Single Molecules; Chapter 7. Practical Quantum Computing; Subject Index. 
650 0 |a Microelectronics. 
650 7 |a TECHNOLOGY & ENGINEERING  |x Electronics  |x Microelectronics. 
650 7 |a TECHNOLOGY & ENGINEERING  |x Electronics  |x Digital. 
700 1 |a Korkin, Anatoli. 
856 4 0 |a Labanowski, Jan K.  |u http://search.ebscohost.com/login.aspx?direct=true&scope=site&db=nlebk&AN=203377 
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