Cover Image

Database needs for modeling and simulation of plasma processing /

Corporate Author: National Research Council (U.S.). Panel on Database Needs in Plasma Processing.
Format: Book
Language:English
Published: Washington, D.C. : National Academy Press, 1996.
Series:The compass series
Subjects:
Semiconductors > Design and construction
Plasma engineering > Databases
Plasma engineering > Computer simulation
Semiconducteurs > Conception et construction
Plasmas, Technique des > Bases de données
Plasmas, Technique des > Simulation par ordinateur
SCIENCE > Physics > Electricity.
Plasma engineering > Computer simulation.
Semiconducteurs > Conception et construction.
Plasmas, Technique des > Bases de donnees.
Plasmas, Technique des > Simulation par ordinateur.
Semiconductors > Design and construction.
Plasma engineering > Databases.
Online Access:http://search.ebscohost.com/login.aspx?direct=true&scope=site&db=nlebk&AN=14032
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245 0 0 |a Database needs for modeling and simulation of plasma processing /  |c Panel on Database Needs in Plasma Processing, Committee on Atomic, Molecular, and Optical Sciences and Plasma Science Committee, Board on Physics and Astronomy, Commission on Physical Sciences, Mathematics, and Applications, National Research Council. 
260 |a Washington, D.C. :  |b National Academy Press,  |c 1996. 
300 |a 1 online resource (64 pages). 
490 1 |a The compass series 
504 |a Includes bibliographical references. 
650 0 |a Semiconductors  |x Design and construction 
650 0 |a Plasma engineering  |x Databases 
650 0 |a Plasma engineering  |x Computer simulation 
650 6 |a Semiconducteurs  |x Conception et construction 
650 6 |a Plasmas, Technique des  |x Bases de données 
650 6 |a Plasmas, Technique des  |x Simulation par ordinateur 
650 7 |a SCIENCE  |x Physics  |x Electricity. 
650 0 7 |a Plasma engineering  |x Computer simulation. 
650 0 7 |a Semiconducteurs  |x Conception et construction. 
650 0 7 |a Plasmas, Technique des  |x Bases de donnees. 
650 0 7 |a Plasmas, Technique des  |x Simulation par ordinateur. 
650 0 7 |a Semiconductors  |x Design and construction. 
650 0 7 |a Plasma engineering  |x Databases. 
710 2 |a National Research Council (U.S.).  |b Panel on Database Needs in Plasma Processing. 
856 4 0 |u http://search.ebscohost.com/login.aspx?direct=true&scope=site&db=nlebk&AN=14032 
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