Description: Database needs for modeling and simulation of plasma processing /

Corporate Author:	National Research Council (U.S.). Panel on Database Needs in Plasma Processing.
Format:	Book
Language:	English
Published:	Washington, D.C. : National Academy Press, 1996.
Series:	The compass series
Subjects:	Semiconductors > Design and construction Plasma engineering > Databases Plasma engineering > Computer simulation Semiconducteurs > Conception et construction Plasmas, Technique des > Bases de données Plasmas, Technique des > Simulation par ordinateur SCIENCE > Physics > Electricity. Plasma engineering > Computer simulation. Semiconducteurs > Conception et construction. Plasmas, Technique des > Bases de donnees. Plasmas, Technique des > Simulation par ordinateur. Semiconductors > Design and construction. Plasma engineering > Databases.
Online Access:	http://search.ebscohost.com/login.aspx?direct=true&scope=site&db=nlebk&AN=14032

Physical Description:	1 online resource (64 pages).
Bibliography:	Includes bibliographical references.
ISBN:	0585084548 9780585084541