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00958nam a2200193 a 4500 |
| 001 |
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20171111234606.0 |
| 008 |
140321t20142014sz ao ob 001 0 eng d |
| 020 |
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|a 9783038264286(ebook)
|z 9783038350477
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| 040 |
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|a CaPaEBR
|b eng
|e rda
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| 050 |
1 |
4 |
|a TK7875
|b .M384 2014eb
|e pn
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| 245 |
0 |
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|a Material science and MEMS production :
|b selected, peer reviewed papers from the 2014 Conference on MEMS and Nanotechnology (MEMS-NANO 2014), January 23-24, 2014, Shenzhen, China /
|c edited by Changhui Liu.
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| 300 |
|
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|a 1 online resource (117 pages) :
|b illustrations (some color), graphs, photographs.
|
| 490 |
1 |
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|a Advanced Materials Research,
|v Volume 901
|x 1662-8985 ;
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| 504 |
|
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|a Includes bibliographical references at the end of each chapters and indexes.
|
| 650 |
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0 |
|a Microelectromechanical systems
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| 700 |
1 |
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|a Liu, Changhui,
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| 856 |
4 |
0 |
|u http://site.ebrary.com/lib/ucy/Doc?id=10846240
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| 952 |
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|a CY-NiOUC
|b 5a045c6c6c5ad14ac1ed8b0b
|c 998a
|d 945l
|e -
|t 1
|x m
|z Books
|
