Material science and MEMS production : selected, peer reviewed papers from the 2014 Conference on MEMS and Nanotechnology (MEMS-NANO 2014), January 23-24, 2014, Shenzhen, China /
| Other Authors: | |
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| Format: | Book |
| Language: | English |
| Series: | Advanced Materials Research,
Volume 901 |
| Subjects: | |
| Online Access: | http://site.ebrary.com/lib/ucy/Doc?id=10846240 |
| Physical Description: | 1 online resource (117 pages) : illustrations (some color), graphs, photographs. |
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| Bibliography: | Includes bibliographical references at the end of each chapters and indexes. |
| ISBN: | 9783038264286(ebook) |
| ISSN: | 1662-8985 ; |