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Chemical vapor deposition

Corporate Author:	ebrary, Inc.
Other Authors:	Park, Jong-Hee,
Format:	Book
Language:	English
Published:	Materials Park, Ohio : ASM International, 2001.
Series:	Surface engineering series ; v. 2
Subjects:	Vapor-plating.
Online Access:	http://site.ebrary.com/lib/ucy/Doc?id=10323519

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