Description: Chemical vapor deposition

Corporate Author:	ebrary, Inc.
Other Authors:	Park, Jong-Hee,
Format:	Book
Language:	English
Published:	Materials Park, Ohio : ASM International, 2001.
Series:	Surface engineering series ; v. 2
Subjects:	Vapor-plating.
Online Access:	http://site.ebrary.com/lib/ucy/Doc?id=10323519

Physical Description:	vii, 481 p. : ill.
Bibliography:	Includes bibliographical references.