|
|
|
|
| LEADER |
00823nam a2200229 a 4500 |
| 001 |
1756444 |
| 005 |
20171111234506.0 |
| 008 |
130410s2013 gw a sb 001 0 eng d |
| 020 |
|
|
|z 9783527335015
|
| 040 |
|
|
|a CaPaEBR
|
| 050 |
1 |
4 |
|a TK7875
|b .R45 2013eb
|
| 245 |
0 |
0 |
|a Reliability of MEMS
|b testing of materials and devices /
|c edited by Osamu Tabata, Toshiyuki Tsuchiya.
|
| 260 |
|
|
|a Weinheim :
|b Wiley-VCH,
|c 2013.
|
| 300 |
|
|
|a xx, 303 p. :
|b ill.
|
| 490 |
1 |
|
|a Advanced micro & nanosystems
|
| 500 |
|
|
|a First edition 2007.
|
| 504 |
|
|
|a Includes bibliographical references and index.
|
| 650 |
|
0 |
|a Microelectromechanical systems
|x Reliability.
|
| 700 |
1 |
|
|a Tabata, Osamu.
|
| 710 |
2 |
|
|a ebrary, Inc.
|
| 856 |
4 |
0 |
|u http://site.ebrary.com/lib/ucy/Doc?id=10682369
|
| 952 |
|
|
|a CY-NiOUC
|b 5a0453536c5ad14ac1ec7bb2
|c 998a
|d 945l
|e -
|t 1
|x m
|z Books
|
