Description: Silicon-on-insulator technology:

Main Author:	Colinge, Jean-Pierre
Format:	Book
Language:	English
Published:	New York: Springer, c2004
Edition:	3rd ed.
Subjects:	Semiconductors Silicon-on-insulator technology Integrated circuits > Very large scale integration Materials

Physical Description:	x, 366 p. : ill. ; 24 cm.
Bibliography:	Includes bibliographical references and index.
ISBN:	1402077734