Microsensors, MEMS, and smart devices/

Main Author: Gardner, J. W. 1958-
Other Authors: Varadan, V. K.,, Awadelkarim, Osama O.
Format: Book
Language:English
Published: Chichester ; New York: J. Wiley, c2001
Subjects:
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020 |a 047186109X  |q hbk. 
040 |a CY  |b University of Cyprus  |e AACR2 
050 |a TK7875.G37 2001 
050 |a TK7875.G37 2001 
100 1 |a Gardner, J. W.  |d 1958-  |q Julian W., 
245 1 0 |a Microsensors, MEMS, and smart devices/  |c Julian W. Gardner, Vijay K. Varadan, Osama O. Awadelkarim 
260 |a Chichester ;  |b J. Wiley,  |c c2001  |a New York: 
300 |a xvi, 503 p. :  |b ill. ;  |c 25 cm. 
504 |a Includes bibliographical references and index. 
650 0 |a Microelectromechanical systems 
650 0 |a Detectors 
700 1 |a Varadan, V. K., 
700 1 |a Awadelkarim, Osama O. 
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