Description: Microsensors, MEMS, and smart devices/

Main Author:	Gardner, J. W. 1958-
Other Authors:	Varadan, V. K.,, Awadelkarim, Osama O.
Format:	Book
Language:	English
Published:	Chichester ; New York: J. Wiley, c2001
Subjects:	Microelectromechanical systems Detectors

Physical Description:	xvi, 503 p. : ill. ; 25 cm.
Bibliography:	Includes bibliographical references and index.
ISBN:	047186109X