Description: Semiconductor manufacturing technology/

Main Author:	Quirk, Michael, 1953-
Other Authors:	Serda, Julian
Format:	Book
Language:	English
Published:	Upper Saddle River, NJ.: Prentice Hall, 2001
Subjects:	Electronic industries Semiconductors > Design and construction

Physical Description:	xiii, 666 p. : ill. ; 29 cm.
Bibliography:	Includes bibliographical references (p. 647) and index.
ISBN:	0130815209