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|a 0444823638
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|a DLC
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| 050 |
0 |
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|a QC176.8.M5
|b M53 1998
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| 245 |
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|a Micro Mechanical Systems /
|c edited by M. Prudenziati, T. Fukuda, W. Menz.
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| 260 |
|
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|a Amsterdam ;
|b Elsevier,
|c 1998.
|a New York :
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| 300 |
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|a viii, 268 p. :
|b ill. ;
|c 25 cm.
|
| 490 |
0 |
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|a Handbook of sensors and actuators ;
|v 6
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| 650 |
|
0 |
|a Micromechanics.
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| 700 |
1 |
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|a Fukuda, T.
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| 856 |
4 |
2 |
|a Menz W.
|u http://www.loc.gov/catdir/enhancements/fy0602/94029429-d.html
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| 952 |
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|a CY-LiCUT
|b 5a01a7376c5ad14ac1e7b5c6
|c 945l
|d 998a
|e -
|t 1
|x m
|z Books
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