Micro Mechanical Systems /
| Other Authors: | |
|---|---|
| Format: | Book |
| Language: | English |
| Published: |
Amsterdam ; New York :
Elsevier,
1998.
|
| Series: | Handbook of sensors and actuators ;
6 |
| Subjects: | |
| Online Access: | http://www.loc.gov/catdir/enhancements/fy0602/94029429-d.html |
| Physical Description: | viii, 268 p. : ill. ; 25 cm. |
|---|---|
| ISBN: | 0444823638 |