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20171111231203.0 |
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|a 0734-211X
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| 040 |
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|a GR-KoDPT
|b gre
|e AACR2
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| 050 |
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|a TJ940
|b .J669
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| 082 |
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0 |
|2 19
|a 621.5/5/05
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| 245 |
1 |
0 |
|a Journal of vacuum science & technology :
|b an official journal of the American Vacuum Society
|
| 246 |
1 |
3 |
|a Journal of vacuum science and technology. B, Microelectronics processing and phenomena
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| 260 |
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|a Microelectronics processing and phenomena
|b Published for the Society by the American Institute of Physics,
|c 1983-c1990
|a New York, N.Y.:
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| 300 |
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|a 8 τ. :
|b εικ. ;
|c 29 εκ.
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| 500 |
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|a Τίτλος από το εξώφυλλο
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| 500 |
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|a Περιέχει: International Symposium on Electron, Ion, and Photon Beams. Proceedings of the .. International Symposium on Electron, Ion, and Photon Beams; και: Molecular Beam Epitaxy Workshop. Proceedings of the .. Molecular Beam Epitaxy Workshop, τα οποία εκδίδονται και χωριστά
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| 650 |
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0 |
|a Vacuum technology
|x Periodicals
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| 710 |
|
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|a American Institute of Physics
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| 710 |
2 |
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|a American Vacuum Society
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| 710 |
0 |
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|a American Institute of Physics
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| 952 |
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|a GR-KoDPT
|b 59cc2e9f6c5ad13446fa9d11
|c 998a
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