Description: Some practical aspects of scribing/

Main Author:	Polcari, Samuel M.
Corporate Authors:	United States National Aeronautics and Space Administration, United States. National Aeronautics and Space Administration, Electronics Research Center U.S.
Format:	Book
Language:	English
Published:	Washington: NASA, 1970
Series:	NASA technical note 5811
Subjects:	Semiconductor wafers

Physical Description:	16 σ. : εικ. ; 27 εκ.