|
|
|
|
LEADER |
00890nam a2200229 a 4500 |
001 |
780581 |
005 |
20171111231151.0 |
008 |
990708s1995 gr r 000 0 eng d |
020 |
|
|
|a 0890067074
|
040 |
|
|
|a GR-KoDPT
|b gre
|e AACR2
|
050 |
|
|
|a TK7871.85
|b .C593 1995
|
082 |
|
0 |
|2 20
|a 621.3815/2/0113
|
245 |
0 |
0 |
|a Computational modeling in semiconductor processing/
|c M. Meyyappan, editor
|
260 |
|
|
|a Boston:
|b Artech House,
|c c1995
|
300 |
|
|
|a x, 363 σ. :
|b εικ. ;
|c 24 εκ.
|
490 |
0 |
|
|a Artech House materials science library
|
504 |
|
|
|a Περιέχει βιβλιογραφικές παραπομπές και ευρετήριο
|
650 |
|
0 |
|a Semiconductors
|x Design and construction
|x Data processing
|
650 |
|
0 |
|a Process control
|x Mathematical models
|
700 |
1 |
|
|a Meyyappan, M.
|
710 |
|
|
|a Artech House
|
952 |
|
|
|a GR-KoDPT
|b 59cc2c7f6c5ad13446fa649e
|c 998a
|d 945l
|e TK 7871 .85
|t 2
|x m
|z Books
|