Foundations of MEMS /
| Main Author: | |
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| Format: | Book |
| Published: |
Upper Saddle River, N.J.:
Pearson Education,
c2006
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| Series: | Illinois ECE Series
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| Subjects: |
| Physical Description: | xv, [2], 530 p. : fig. ; 24 cm. |
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| Bibliography: | Includes bibliographical references and index. |
| ISBN: | 0131472860 |