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030214s2002----gr gr 000 0 Eng d |
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|a 0849311543
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|a GR-AtNTU
|b gre
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|a 621.36 MIN
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| 100 |
1 |
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|a Minh, Phan Ngoc
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| 245 |
1 |
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|a Fabrication of silicon microprobes for optical near-field applications /
|c Phan Ngoc Minh, Ono Takahito, Esashi Masayoshi
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| 260 |
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|a Boca Raton, Fl:
|b CRC Press,
|c c2002
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| 300 |
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|a [xi], 180 p. :
|b fig. ;
|c 24 cm.
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| 504 |
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|a Includes bibliographical references, index.
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| 650 |
1 |
0 |
|a Micromachining
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| 650 |
1 |
0 |
|a Silicon
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| 650 |
1 |
0 |
|a Near-field microscopy
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| 700 |
1 |
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|a Takahito, Ono
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| 700 |
1 |
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|a Masayoshi, Esashi
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| 952 |
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|a GR-AtNTU
|b 59cc16686c5ad13446f6b7e8
|c 998a
|d 945l
|e 621.36 MIN
|t 1
|x m
|z Books
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