Fundamental electron interactions with plasma processing gases/
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| Other Authors: | |
| Format: | Book |
| Language: | English |
| Published: |
New York:
Kluwer Academic/Plenum Publishers,
c2004
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| Series: | Physics of atoms and molecules
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| Subjects: |
| Physical Description: | xii, 776 p. : ill. ; 26 cm. |
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| Bibliography: | Includes bibliographical references and index. |
| ISBN: | 0306480379 |