Advances in rapid thermal and integrated processing/

Corporate Authors: Kluwer, North Atlantic Treaty Organization. Scientific Affairs Division, NATO Advanced Study Institute on Advances in Rapid Thermal and Integrated Processing
Other Authors: Roozeboom, Fred
Format: Book
Language:English
Published: Dordrecht: Kluwer Academic Publishers, c1996
Series:NATO ASI series. Series E, Applied sciences vol. 318
Subjects:
LEADER 01593nam a2200313 a 4500
001 1943843
005 20171111235825.0
008 990617s1996 gr r 000 0 eng d
020 |a 0792340116 
040 |a GR-KoDPT  |b gre  |e AARC2 
050 |a TK7871.85  |b .A355 1996 
082 0 |2 20  |a 621.3815/2 
245 0 0 |a Advances in rapid thermal and integrated processing/  |c edited by Fred Roozeboom 
260 0 0 |a Dordrecht:  |b Kluwer Academic Publishers,  |c c1996 
300 0 0 |a xii, 565 σ. :  |b εικ. ;  |c 25 εκ. 
490 0 0 |a NATO ASI series. Series E, Applied sciences  |v vol. 318 
500 0 0 |a "Published in cooperation with NATO Scientific Affairs Division." 
500 0 0 |a "Proceedings of the NATO Advanced Study Institute on Advances in Rapid Thermal and Integrated Precessing, Acquafredda di Maratea, Italy, July 3-14, 1995"--Verso σ.τ. 
504 0 0 |a Περιέχει βιβλιογραφικές παραπομπές και ευρετήριο 
504 0 0 |a Περιέχει βιβλιογραφία και ευρετήριο 
650 0 0 |a Rapid thermal processing  |x Congresses 
650 0 0 |a Semiconductors  |x Heat treatment  |x Congresses 
650 0 0 |a Rapid thermal prosessing  |x Congresses 
700 1 0 |a Roozeboom, Fred 
710 1 0 |a Kluwer 
710 0 0 |a North Atlantic Treaty Organization.  |b Scientific Affairs Division  
711 2 0 |a NATO Advanced Study Institute on Advances in Rapid Thermal and Integrated Processing  |d (1995 : 
952 |a GRThAnMak  |b 59cca2cf6c5ad13446029dfb  |c 998a  |d 945l  |e 621.3815 ADV  |t 1  |x m  |z Books 
952 |a GR-KoDPT  |b 59cc33e96c5ad13446fb1038  |c 998a  |d 945l  |e TK 7871 .85  |t 1  |x m  |z Books