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01110nam a2200277 a 4500 |
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20171111235754.0 |
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990528s1997 gr r 000 0 eng d |
| 020 |
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|a 0849394511
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| 040 |
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|a GR-KoDPT
|b greeAACR2
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| 050 |
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|a TK7836
|b .M33 1997
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| 082 |
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0 |
|2 20
|a 621.3815/2
|
| 100 |
1 |
0 |
|a Madou, Marc J.
|
| 245 |
1 |
0 |
|a Fundamentals of microfabrication/
|c Marc Madou
|
| 260 |
1 |
0 |
|a Boca Raton, Fla.:
|b CRC Press,
|c c1997
|
| 300 |
1 |
0 |
|a 589 ,[22] σ.πίνακες :
|b εικ. (μερ. έγχρ.) ;
|c 29 εκ.
|
| 504 |
1 |
0 |
|a Περιέχει βιβλιογραφικές παραπομπές (σ. 565-569) και ευρετήριο
|
| 504 |
1 |
0 |
|a Includes bibliographical references and index.
|
| 650 |
1 |
0 |
|a Microelectronics
|x Design and construction
|
| 650 |
1 |
0 |
|a Machining
|
| 650 |
1 |
0 |
|a Microelectronic packaging
|
| 650 |
1 |
0 |
|a Lasers
|x Industrial applications
|
| 650 |
1 |
0 |
|a Microelectronics
|x Design and construction
|
| 710 |
1 |
0 |
|a CRC Press
|
| 952 |
|
|
|a GR-AtNTU
|b 59cc28d56c5ad13446f9cc7f
|c 998a
|d 945l
|e 621.38152 MAD
|t 1
|x m
|z Books
|
| 952 |
|
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|a GR-KoDPT
|b 59cc35e16c5ad13446fb3bd1
|c 998a
|d 945l
|e TK 7826
|t 1
|x m
|z Books
|
