Mechanics of microelectromechanical systems /

Main Author: Lobontiu, Nicolae.
Other Authors: Garcia, E.
Format: Book
Language:English
Published: New York ; [Great Britain] : Kluwer Academic, ©2005.
Subjects:
Online Access:http://search.ebscohost.com/login.aspx?direct=true&scope=site&db=nlebk&AN=124998
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300 |a 1 online resource (xi, 405 pages) :  |b illustrations 
504 |a Includes bibliographical references and index. 
650 0 |a Microelectromechanical systems. 
650 6 |a Micromachines. 
650 7 |a TECHNOLOGY & ENGINEERING  |x Electronics  |x Microelectronics. 
650 7 |a TECHNOLOGY & ENGINEERING  |x Electronics  |x Digital. 
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