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01049nam a2200229 a 4500 |
| 001 |
1857333 |
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20171111234640.0 |
| 008 |
140916t20142014enka ob 001 0 eng d |
| 020 |
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|a 9781118847329(ebook)
|z 9781118847565
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| 040 |
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|a CaPaEBR
|b eng
|e rda
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| 050 |
1 |
4 |
|a T174.7
|b .H39 2014eb
|e pn
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| 100 |
1 |
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|a Hawkeye, Matthew M.,
|e author.
|
| 245 |
1 |
0 |
|a Glancing angle deposition of thin films :
|b engineering the nanoscale /
|c Matthew M. Hawkeye, Michael T. Taschuk, Michael J. Brett.
|
| 300 |
|
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|a 1 online resource (316 pages) :
|b illustrations (some color).
|
| 490 |
1 |
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|a Wiley Series in Materials for Electronic and Optoelectronic Applications
|
| 504 |
|
|
|a Includes bibliographical references at the end of each chapters and index.
|
| 650 |
|
0 |
|a Nanotechnology.
|
| 650 |
|
0 |
|a Chemical vapor deposition.
|
| 650 |
|
0 |
|a Nanoelectromechanical systems
|x Design and construction.
|
| 700 |
1 |
|
|a Taschuk, Michael T.,
|
| 856 |
4 |
0 |
|a Brett, Michael J.,
|u http://site.ebrary.com/lib/ucy/Doc?id=10891175
|
| 952 |
|
|
|a CY-NiOUC
|b 5a0460426c5ad14ac1ee1e70
|c 998a
|d 945l
|e -
|t 1
|x m
|z Books
|
