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00925nam a2200229 a 4500 |
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1834344 |
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20171111234618.0 |
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060906s2006 enka sb 000 0 eng d |
| 020 |
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|z 9781860946240
|z 9781860949098
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|a CaPaEBR
|z 1860946240
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| 050 |
1 |
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|a TK7875
|b .S55 2006eb
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| 240 |
1 |
0 |
|a Silicon carbide microelectromechanical systems for harsh environments
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|a Silicon carbide micro electromechanical systems for harsh environments
|c editor Rebecca Cheung.
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| 246 |
3 |
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|a Silicon carbide microelectromechanical systems for harsh environments
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| 260 |
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|a London :
|b Imperial College Press,
|c c2006.
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| 300 |
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|a x, 181 p. :
|b ill.
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| 504 |
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|a Includes bibliographical references.
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| 650 |
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0 |
|a Microelectromechanical systems.
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| 700 |
1 |
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|a Cheung, Rebecca.
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| 710 |
2 |
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|a ebrary, Inc.
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| 856 |
4 |
0 |
|u http://site.ebrary.com/lib/ucy/Doc?id=10201168
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| 952 |
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|b 5a045e106c5ad14ac1edbf6d
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