Transmission electron microscopy in micro-nanoelectronics
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| Format: | Book |
| Language: | English |
| Published: |
Hoboken, N.J. : London :
John Wiley &Sons, Inc., ; ISTE,
2013.
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| Series: | Nanoscience and nanotechnology series
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| Online Access: | http://site.ebrary.com/lib/ucy/Doc?id=10653885 |
| Physical Description: | xiii, 243 p. : ill. |
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| Bibliography: | Includes bibliographical references and index. |