Description: Chemistry in microelectronics

Corporate Author:	ebrary, Inc.
Other Authors:	Tiec, Yannick Le.
Format:	Book
Language:	English
Published:	London : ISTE, 2013.
Series:	Electronics engineering series
Subjects:	Microelectronics. Electronics > Materials.
Online Access:	http://site.ebrary.com/lib/ucy/Doc?id=10671571

Physical Description:	xii, 372 p. : ill.
Bibliography:	Includes bibliographical references and index.