MEMS: design and fabrication/
| Other Authors: | |
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| Format: | Book |
| Language: | English |
| Published: |
Boca Raton, FL:
CRC/Taylor & Francis,
[c2006]
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| Edition: | 2nd ed. |
| Series: | Mechanical engineering (Taylor & Francis)
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| Subjects: |
| Physical Description: | 1 v. (various pagings) : ill. ; 26 cm. |
|---|---|
| Bibliography: | Includes bibliographical references and index. |
| ISBN: | 0849391385 9780849391385 |