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| LEADER |
00782nam a2200205 a 4500 |
| 001 |
1544223 |
| 005 |
20171111233632.0 |
| 008 |
070125s2006 cy da r 000 u eng d |
| 020 |
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|a 3527312463
|q hbk.
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| 020 |
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|a 9783527312467
|q hbk.
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| 040 |
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|a CY
|b University of Cyprus
|e AACR-2
|
| 050 |
|
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|a T174.7.M53 2006
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| 245 |
1 |
0 |
|a Micro process engineering:
|b fundamentals, devices, fabrication, and applications/
|c volume editor Norbert Kockmann
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| 260 |
|
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|a Weinheim:
|b Wiley-VCH,
|c [c2006]
|
| 300 |
|
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|a xxii, 507 p. :
|b ill. ;
|c 24 cm.
|
| 490 |
0 |
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|a Advanced micro & nanosystems
|v 5
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| 504 |
|
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|a Includes bibliographical references and index.
|
| 650 |
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0 |
|a Production engineering
|
| 700 |
1 |
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|a Kockmann, Norbert
|
| 952 |
|
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|a CY-NiOUC
|b 5a04304d6c5ad14ac1e8b9e3
|c 998a
|d 945l
|e T174.7.M53 2006
|t 1
|x m
|z Books
|
