Principles and applications of NanoMEMS physics/

Main Author: Santos, Hector J. de los
Format: Book
Language:English
Published: Dordrecht, The Netherlands: Springer, 2005
Series:Microsystems 15
Subjects:
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020 |a 1402032382  |q hbk. 
040 |a CY  |b University of Cyprus  |e AACR2 
050 |a QC688.S36 2005 
100 1 |a Santos, Hector J. de los 
245 1 0 |a Principles and applications of NanoMEMS physics/  |c by Hector De Los Santos 
260 |a Dordrecht, The Netherlands:  |b Springer,  |c 2005 
300 |a xv, 254 p. :  |b ill. ;  |c 25 cm. 
490 0 |a Microsystems  |v 15 
504 |a Includes bibliographical references (p. [241]-252) and index. 
650 0 |a Quantum electronics 
650 0 |a Wave-particle duality 
650 0 |a Nanotechnology 
650 0 |a Microelectromechanical systems 
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