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| LEADER |
00761nam a2200193 a 4500 |
| 001 |
1501290 |
| 005 |
20171111233557.0 |
| 008 |
040906s2002 cy da r 000 u eng d |
| 020 |
|
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|a 0849312620
|q hbk.
|
| 040 |
|
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|a CY
|b University of Cyprus
|e AACR2
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| 050 |
|
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|a TK7875.L9597 2002
|
| 100 |
1 |
|
|a Lyshevski, Sergey Edward
|
| 245 |
1 |
0 |
|a MEMS and NEMS:
|b systems, devices, and structures/
|c Sergey Edward Lyshevski
|
| 260 |
|
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|a Boca Raton, Fla.:
|b CRC Press,
|c c2002
|
| 300 |
|
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|a 461 p. :
|b ill. ;
|c 25 cm.
|
| 490 |
0 |
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|a Nano- and microscience, engineering, technology, and medicine series
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| 504 |
|
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|a Includes bibliographical references and index.
|
| 650 |
|
0 |
|a Microelectromechanical systems
|
| 952 |
|
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|a CY-NiOUC
|b 5a0429ae6c5ad14ac1e80060
|c 998a
|d 945l
|e TK7875.L9597 2002
|t 1
|x m
|z Books
|
