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| 008 |
060710s2002____cy a b 001|0 eng|d |
| 020 |
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|a 0849308267
|q hbk.
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| 040 |
|
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|a DLC
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| 050 |
0 |
0 |
|a TK7836
|b .M33 2002
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| 100 |
1 |
|
|a Madou, Marc J.
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| 245 |
1 |
0 |
|a Fundamentals of microfabrication :
|b the science of miniaturization /
|c Marc J. Madou.
|
| 250 |
|
|
|a 2nd ed.
|
| 260 |
|
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|a Boca Raton :
|b CRC Press,
|c c2002.
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| 300 |
|
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|a 723 p. :
|b col. ill. ;
|c 29 cm.
|
| 504 |
|
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|a Includes bibliographical references and index.
|
| 650 |
|
0 |
|a Integrated circuits
|x Design and construction.
|
| 650 |
|
0 |
|a Lasers
|x Industrial applications.
|
| 650 |
|
0 |
|a Machining.
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| 650 |
|
0 |
|a Microelectromechanical systems
|x Design and construction.
|
| 650 |
|
0 |
|a Microelectronic packaging.
|
| 650 |
|
0 |
|a Microelectronics.
|
| 952 |
|
|
|a CY-LiCUT
|b 5a01a5216c5ad14ac1e77ac4
|c 945l
|d 998a
|e -
|t 1
|x m
|z Books
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