Focused ion beams from liquid metal ion sources/
| Main Author: | |
|---|---|
| Other Authors: | |
| Format: | Book |
| Language: | English |
| Published: |
Taunton, Somerset, England:
Research Studies Press,
1991
|
| Series: | Electronic & electrical engineering research studies : Microengineering series ;
1 |
| Subjects: |
| Physical Description: | xi, 332 p. : ill., diagr. ; 24 cm. |
|---|---|
| Bibliography: | Includes bibliographical references and index |
| ISBN: | 086380120X |