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Glow-discharge hydrogenated amorphous silicon/

Main Author:	Tanaka, K. (Kazunobu)
Format:	Book
Language:	English
Published:	Dordrecht: KTK Scientific Publishers/ Kluwer Academic Publishers, 1989
Series:	Advances in solid state technology
Subjects:	Amorphous semiconductors Silicon Doped semiconductors Surface chemistry Glow discharges

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