Influence of the deposition conditions on radiofrequency magnetron sputtered MoS2 films/

Main Author: Steinmann, Pierre A.
Corporate Authors: United States National Aeronautics and Space Administration Scientific and Technical Information Division, United States. National Aeronautics and Space Administration. Scientific and Technical Information Division, Lewis Research Center
Other Authors: Spalvins, Talivaldis
Format: Book
Language:English
Published: Washington: National Aeronautics and Space Administration, Scientific and Technical Information Division, 1990
Series:NASA technical paper 2994
Subjects:
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490 0 |a NASA technical paper  |v 2994 
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650 0 |a Molybdenum compounds 
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710 |a United States  |b National Aeronautics and Space Administration  |b Scientific and Technical Information Division 
710 0 |a United States.  |b National Aeronautics and Space Administration.  |b Scientific and Technical Information Division 
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