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Ion implantation in semiconductors/

Main Author:	Stievenard, D.
Corporate Author:	Trans Tech
Other Authors:	Bourgoin, J. C.
Format:	Book
Language:	English
Published:	Aedermannsdorf, Switzerland ; Brookfield, VT, USA: Trans Tech Publications, c1988
Subjects:	Ion implantation Semiconductors Semiconductor doping Semiconductors > Effect of radiation on

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