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00880nam a2200205 a 4500 |
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1871100 |
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20171111234653.0 |
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150521t20152015gw a ob 001 0 eng d |
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|a 9783527676361(ebook)
|z 9783527335459
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040 |
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|a CaPaEBR
|b eng
|e rda
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050 |
1 |
4 |
|a TK7875
|b .R476 2015eb
|e pn
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245 |
0 |
0 |
|a Resonant MEMS :
|b fundamentals, implementation and application /
|c edited by Oliver Brand [and three others].
|
300 |
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|a 1 online resource (512 pages) :
|b illustrations (some color), graphs.
|
490 |
1 |
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|a Advanced Micro & Nanosystems
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504 |
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|a Includes bibliographical references at the end of each chapters and index.
|
650 |
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0 |
|a Microelectromechanical systems
|x Design and construction.
|
650 |
|
0 |
|a Microfabrication.
|
700 |
1 |
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|a Brand, Oliver,
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856 |
4 |
0 |
|u http://site.ebrary.com/lib/ucy/Doc?id=11052833
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952 |
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|a CY-NiOUC
|b 5a0461966c5ad14ac1ee5593
|c 998a
|d 945l
|e -
|t 1
|x m
|z Books
|