Resonant MEMS : fundamentals, implementation and application /

Other Authors: Brand, Oliver,
Format: Book
Language:English
Series:Advanced Micro & Nanosystems
Subjects:
Online Access:http://site.ebrary.com/lib/ucy/Doc?id=11052833
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245 0 0 |a Resonant MEMS :  |b fundamentals, implementation and application /  |c edited by Oliver Brand [and three others]. 
300 |a 1 online resource (512 pages) :  |b illustrations (some color), graphs. 
490 1 |a Advanced Micro & Nanosystems 
504 |a Includes bibliographical references at the end of each chapters and index. 
650 0 |a Microelectromechanical systems  |x Design and construction. 
650 0 |a Microfabrication. 
700 1 |a Brand, Oliver, 
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